High performance hydrogen sensor based on Pd/TiO2 composite film |
| |
| Authors: | Sheng Mao Han Zhou Shuanghong Wu Junjie Yang Zhongyuan Li Xiongbang Wei Xiangru Wang Zhiyong Wang Jie Li |
| |
| Affiliation: | 1. School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu, 610054, China;2. College of Optoelectronic Technology, Chengdu University of Information Technology, Chengdu, 610225, China |
| |
| Abstract: | Hydrogen sensors with fast response and recovery rate based on nanoporous palladium (Pd) and titanium dioxide (TiO2) composite films supported by anodic aluminum oxide (AAO) template have been demonstrated. Nanoporous TiO2 film was sprayed on the porous AAO templates, followed by Pd film deposited on TiO2 layer by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensors depending on different thickness of TiO2 layer from 6 to 30 nm with keeping the thickness of Pd as 30 nm. The results have demonstrated the sensors with 10 nm thickness of TiO2 achieve the best performance with a response/recovery time as short as 4/8s at 0.8% and 0.4% hydrogen concentration, respectively. The sensors exhibited very good performance under hydrogen concentrations from 0.4% to 1.8%. |
| |
| Keywords: | AAO Hydrogen sensor Pd |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
