Growth of vanadium oxide films on InP under mild conditions and thermal oxidation of the resultant structures |
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| Authors: | B. V. Sladkopevtsev I. Ya. Mittova E. V. Tomina N. A. Burtseva |
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| Affiliation: | 1.Voronezh State University,Voronezh,Russia |
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| Abstract: | Techniques have been developed for producing vanadium oxide films (10 nm to 1 μm thick) on indium phosphide using vanadium(V) oxide gels and sols through immersion and deposition from aerosol. Using scanning tunneling microscopy and X-ray diffraction, we have studied the influence of annealing temperature and time on the morphology and composition of the films and the influence of the films on the thermal oxidation of InP. |
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