| 液晶掩模的纳秒脉冲激光加工试验 |
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| 引用本文： | 陈飞,张朝阳,王耀民,张永康. 液晶掩模的纳秒脉冲激光加工试验[J]. 红外与激光工程, 2011, 40(10): 1940-1943 |
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| 作者姓名： | 陈飞 张朝阳 王耀民 张永康 |
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| 作者单位： | 江苏大学机械工程学院,江苏镇江,212013 |
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| 基金项目： | 国家自然科学基金(50975127); 高校博士点专项科研基金(20093227120006); 中国博士后科研基金(20080431072); 江苏省博士后科研基金(0801004C) |
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| 摘 要： | 利用LCD作为加工掩模,采用波长为1064nm的纳秒脉冲激光进行液晶掩模加工试验研究.讨论了液晶掩模对激光的调制作用,并且通过试验研究了液晶掩模加工图形特点和液晶损伤的阈值,测得了液晶掩模损伤阈值.观察液晶掩模的加工形貌发现,图形线条呈现边缘没有烧蚀而内部发生烧蚀的现象,其原因是由于黑栅遮光引起的边框效应和黑色像素的光...
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| 关 键 词： | 液晶掩模 光束调制 液晶掩模损伤阈值 边框效应 |
Experiment of nanosecond pulsed laser processing with liquid crystal display mask |
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| Chen Fei,Zhang Zhaoyang,Wang Yaomin,Zhang Yongkang. Experiment of nanosecond pulsed laser processing with liquid crystal display mask[J]. Infrared and Laser Engineering, 2011, 40(10): 1940-1943 |
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| Authors: | Chen Fei Zhang Zhaoyang Wang Yaomin Zhang Yongkang |
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| Affiliation: | Chen Fei,Zhang Zhaoyang,Wang Yaomin,Zhang Yongkang(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China) |
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| Abstract: | Using liquid crystal display(LCD) as a mask,a nanosecond pulsed laser(1 064 nm) was applied to study the characteristic of laser processing with LCD mask.The modulation effect of LCD mask on laser was discussed and the graphics morphology of laser processing and the damage threshold of LCD were studied by experiment.The laser damage threshold of LCD mask was measured.By observing the graphics morphology,the graphics of LCD mask processing showed that its edges were not ablated but the inside was ablated.It ... |
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| Keywords: | LCD mask beam modulation LCD mask damage threshold border effect |
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