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界面层对激光减反膜的影响研究
引用本文:季一勤,刘华松,王占山,陈德应,樊荣伟,姜玉刚,洪伟,刘丹丹,吴志新,王日.界面层对激光减反膜的影响研究[J].红外与激光工程,2011,40(10):2003-2007,2027.
作者姓名:季一勤  刘华松  王占山  陈德应  樊荣伟  姜玉刚  洪伟  刘丹丹  吴志新  王日
作者单位:1. 哈尔滨工业大学可调谐激光技术国防科技重点实验室,黑龙江哈尔滨150001;天津市薄膜光学重点实验室,天津300192
2. 天津市薄膜光学重点实验室,天津,300192
3. 同济大学精密光学工程技术研究所,上海,200092
4. 哈尔滨工业大学可调谐激光技术国防科技重点实验室,黑龙江哈尔滨,150001
基金项目:天津市科委项目(10JCYBJC01500)
摘    要:激光技术的发展对减反膜提出了超高透过率的要求,基板的表面特征在高精度减反膜的设计与制造中不可忽略.选择熔融石英为基板,Ta2O5和SiO2为高低折射率膜层材料,针对在0 °入射角下工作的532 nm激光减反膜进行设计与分析,得到膜层内的电场分布.在模拟计算中将基板的表面粗糙度等效为等比例混合膜,计算分析了理想设计条件下...

关 键 词:激光减反膜  界面层  表面粗糙度  修正设计

Influence of interface layer on antireflection coating for laser optics
Ji Yiqin,Liu Huasong,Wang Zhanshan,Chen Deying,Fan Rongwei,Jiang Yugang,Hong Wei,Liu Dandan,Wu Zhinxin,Wang Ri.Influence of interface layer on antireflection coating for laser optics[J].Infrared and Laser Engineering,2011,40(10):2003-2007,2027.
Authors:Ji Yiqin  Liu Huasong  Wang Zhanshan  Chen Deying  Fan Rongwei  Jiang Yugang  Hong Wei  Liu Dandan  Wu Zhinxin  Wang Ri
Affiliation:Ji Yiqin1,2,Liu Huasong2,Wang Zhanshan3,Chen Deying1,Fan Rongwei1,Jiang Yugang2,Hong Wei2,Liu Dandan2,Wu Zhinxin2,Wang Ri2(1.National Key Labratory of Science and Technology on Tunable Laser,Harbin Insitute of Technology,Harbin 150001,China,2.Tianjin Key Laboratory of Optical Thin Film,Tianjin 300192,3.Institute of Precision Optical Engineering,Tongji University,Shanghai 200092,China)
Abstract:With the development of laser technology,there is a requirement of the antireflection coating with ultra-high transmittance.It is crucial to consider the influence of the surface characteristics of substrates during the design,manufacture of high precision antireflection coating.In this paper,the substrate was fused silica and Ta2O5 and SiO2 were selected as high index and low index materials respectively.The 532 nm laser antireflection coating at normal incidence was designed,and the electric field distrib...
Keywords:antireflection coating  interface layer  surface roughness  modified design  
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