| 激光三角测距法自动调焦模型的建立与分析 |
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| 引用本文： | 范富明,程良伦,肖磊,Quanmin Zhu.激光三角测距法自动调焦模型的建立与分析[J].红外与激光工程,2011,40(10). |
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| 作者姓名： | 范富明 程良伦 肖磊 Quanmin Zhu |
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| 作者单位： | 1. 广东工业大学自动化学院,广东广州,510006
2. 西英格兰大学计算机工程与数学学院,英国布里斯托尔BS161QY |
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| 基金项目： | 广东省产学研基金(2009B090300242,2010A090100030) |
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| 摘 要： | 为了满足工业TFT-LCD检测系统中显微镜对主动自动对焦的要求,提出了一种基于激光三角测距法主动自动调焦的方法,建立了相应的数学模型并进行了实验数据分析。该方法在可见光光路中加入一路808 nm波长的红外光,红外光在被检测物体表面反射后经过一系列光学器件投射在CCD相机上形成一个光斑,以对焦完成时CCD上光斑半径最小为基准,给出了离焦量δ与光斑信息探测量r之间的数学关系,据此实时控制PZT进行自动调焦。初步以50×物镜进行实验,结果显示其在焦平面±30μm范围内的实际测量值与理论值吻合,线性度优越,调焦精度达到0.2μm。与传统的显微镜调焦方法相比具有精度高、线性度好、调焦速度快等优点,满足工业检测自动化的实际需要。
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| 关 键 词： | 光学检测 激光三角法 自动调焦 离焦检测 数学模型 |
Establishment and analysis of auto-focus model for laser triangulation method |
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| Fan Fuming,Cheng Lianglun,Xiao Lei,Quanmin Zhu.Establishment and analysis of auto-focus model for laser triangulation method[J].Infrared and Laser Engineering,2011,40(10). |
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| Authors: | Fan Fuming Cheng Lianglun Xiao Lei Quanmin Zhu |
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| Affiliation: | Fan Fuming1,Cheng Lianglun1,Xiao Lei1,Quanmin Zhu2(1.Faculty of Automation,Guangdong University of Technology,Guangzhou 510006,China,2.Intelligent Autonomous Systems Lab,University of the West of England(UWE),Bristol BS161QY,UK) |
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| Abstract: | To satisfy the requirements of microscope of active auto focus in industrial TFT-LCD inspection system,a distance measuring method based on laser triangulation method of active auto-focus was put forward.The corresponding mathematical model was built and experimental data were analyzed.In the visible optical wavelength with 808 nm,halfway infrared light was added to detect infrared light reflected from the surface through a series of optical devices onto a CCD camera to form a special spot focused on the co... |
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| Keywords: | optical inspection laser triangulation method auto-focus defocus detection mathematical model |
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