| 不锈钢衬底的预处理条件对碳纳米管薄膜场发射性能的影响 |
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| 引用本文： | 樊志琴,张兵临,姚宁,鲁占灵,杨仕娥,马丙现.不锈钢衬底的预处理条件对碳纳米管薄膜场发射性能的影响[J].半导体学报,2004,25(11). |
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| 作者姓名： | 樊志琴 张兵临 姚宁 鲁占灵 杨仕娥 马丙现 |
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| 作者单位： | 1. 郑州大学材料物理教育部重点实验室,郑州,450052;郑州工程学院数理系,郑州,450052
2. 郑州大学材料物理教育部重点实验室,郑州,450052 |
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| 摘 要： | 在不同预处理条件的不锈钢衬底上,利用微波等离子体化学气相沉积(MWPCVD)方法从甲烷和氢气的混合气体中沉积碳纳米管薄膜,并对其场发射性能进行了研究.实验发现,不锈钢衬底的机械抛光和酸洗,能降低碳纳米管膜的开启场强,增大它的发射电流密度.在场强为6.25V/μm时,衬底未处理样品的电流密度为1.2mA/cm2,而衬底抛光的样品和衬底抛光又酸洗的样品的电流密度分别达到3.2和2.75mA/cm2.衬底只需机械抛光,而不需要酸洗,就能改良碳纳米管膜的场发射性能.
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| 关 键 词： | 碳纳米管膜 MWPCVD 场发射 Raman光谱 |
Influence of Pretreatment Conditions of Stainless Steel Substrates on Field Emission Properties of Carbon Nanotubes Films |
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| Fan Zhiqin,Zhang binglin,YAO Ning,Lu Zhanling,Yang Shie,Ma Bingxian.Influence of Pretreatment Conditions of Stainless Steel Substrates on Field Emission Properties of Carbon Nanotubes Films[J].Chinese Journal of Semiconductors,2004,25(11). |
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| Authors: | Fan Zhiqin Zhang binglin YAO Ning Lu Zhanling Yang Shie Ma Bingxian |
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| Abstract: | Carbon nanotubes (CNTs) are synthesized from methane and hydrogen gas mixture directly on stainless steel plates by microwave plasma chemical vapor deposition (MWPCVD).By varying pretreatment conditions of the substrates such as mechanically polishing and acid washing,it is found the polishing and acid washing can lower the turn-on field and improve the emission current density.The current density of the un-pretreated sample attains 1.2mA/cm2,but the polished sample and polished acidly washed sample attain 3.2 and 2.75mA/cm2,respectively,at the electric field of 6.25V/μm. |
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| Keywords: | carbon nanotube MWPCVD field emission Raman spectroscopy |
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