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无机络合溶胶-凝胶法制备多孔ZnO薄膜
引用本文:杨立荣,靳正国,步邵静,程志捷.无机络合溶胶-凝胶法制备多孔ZnO薄膜[J].半导体学报,2004,25(3).
作者姓名:杨立荣  靳正国  步邵静  程志捷
作者单位:天津大学材料学院,先进陶瓷与加工技术教育部重点实验室,天津,300072
摘    要:利用无机络合溶胶-凝胶法制备多孔ZnO薄膜,同时利用多种测试手段对薄膜的晶体结构、表面形貌、多孔和光学性能进行了研究.XRD和SEM的测试结果表明,ZnO薄膜的晶体结构为六方纤锌矿,薄膜表面呈多孔状.由孔径分布曲线得出薄膜的孔主要集中在介孔2.02nm和4.97nm;500℃煅烧得到的ZnO薄膜的比表面积是27.57m2/g;在不同温度下煅烧的薄膜在可见光区域透射率均高于85%,光学带宽为3.25eV.

关 键 词:多孔ZnO薄膜  无机络合溶胶-凝胶法  孔径分布  性能

A Novel Approach to Synthesizing Porous ZnO Films:Inorganic Chelating Sol-Gel Method
Yang Lirong,Jin Zhengguo,Bu Shaojing,Cheng Zhijie.A Novel Approach to Synthesizing Porous ZnO Films:Inorganic Chelating Sol-Gel Method[J].Chinese Journal of Semiconductors,2004,25(3).
Authors:Yang Lirong  Jin Zhengguo  Bu Shaojing  Cheng Zhijie
Abstract:Porous ZnO films are synthesized by inorganic chelating sol-gel method,which is a novel sol-gel technique using zinc nitrate as starting materials and citric acid as the chelating reagent.The crystal structure,surface morphology,porous and optical properties of the deposited films are investigated.X-ray diffraction pattern analysis shows that crystal structure of the ZnO films is hexagonal wurtzite.Scanning electron microscopy (SEM) shows that the ZnO film is porous.The curve of pore size distribution has two peak values at about 2.02nm and 4.97nm and BET surface area of the ZnO film is 27.57m2/g.In addition,the transmittance spectrum gives a high transmittance of 85% in the visible region and optical bandgap of the ZnO film (fired at 500℃) is 3.25eV.
Keywords:porous ZnO film  inorganic chelating sol-gel method  pore size distribution  properties
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