| 4-4BS型扫描电镜故障分析与处理 |
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| 引用本文： | 庄同信,赵明.4-4BS型扫描电镜故障分析与处理[J].现代仪器,2000(2):48-49. |
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| 作者姓名： | 庄同信 赵明 |
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| 作者单位： | 哈尔滨汽轮机厂中央材料试验究所,哈尔滨,150046 |
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| 摘 要： | 本文概述了4-4BS扫描电镜的几例故障分析及排除方法,例如真空系统、扫描电路、电压电源、水冷系统等部分故障。
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| 关 键 词： | 扫描电镜 真空系统 扫描电路 高压电源 水冷系统 |
Trouble Analysis and Soiution of SEM4-4BS |
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| Zhuang Tongxi,Zhao ming.Trouble Analysis and Soiution of SEM4-4BS[J].Modern Instruments,2000(2):48-49. |
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| Authors: | Zhuang Tongxi Zhao ming |
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| Affiliation: | Central Materials Research Institute of Harbin Turbine Works Harbin 150046 |
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| Abstract: | This article is about the faults study and solution on the scanning electron microscope of CamScanlnstrument CamScan 4-rBS. Such as Vacuum System. Scan Circuit. EHT PowerSuppiy and Water cooled System. |
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| Keywords: | Scanning Electron Micrope Vacuum System Scan Circuit EHT Power Supply Water Cooled System |
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