Structure and gas permeability of nanoporous metal oxide coatings produced by the alkoxide method

Peculiarities of the preparation of selective nanoporous metal oxide coatings on the surface of macroporous rutile support (pore size 0.1 μm and mixed aluminum and titanium oxides (pore size 0.05 μm) are presented. Gas selective coatings of empirical formula of P _x Ti_{1 ? 0.5x} O_{2 ± δ} with uniform distribution of nanosized pores have been obtained with the alkoxide method using titanium alkoxide and ettriol phosphite (precursor of the phosphorous-containing component) at their various total concentrations. Surface morphology of the obtained membranes has been investigated and major parameters of gas selective coatings have been determined. It has been shown that the dependences of the He, N₂, CO₂, and C₃H₈ gas permeability on temperature and pressure drop are consistent with the molecular regime of gas flow. The reproducible effect of permeability anisotropy of ～502?60% is observed when the integral vacuum method is used.