微变形反射镜技术应用及发展

变形反射镜是用于自适应光学中波前校正的重要元件,它能产生可控的波面校正量对波面相位加以校正。但随着自适应光学技术的发展,传统变形反射镜已不能满足微型化、集成化的发展需求,而基于微机电加工技术的新型变形反射镜的出现解决了传统变形反射镜存在的问题。介绍了微变形反射镜的工作原理,国内外微变形反射镜技术的发展情况及其在自适应光学中的应用,并对分立式与连续表面微变形反射镜的校正能力进行了比较分析,最后阐述了微变形反射镜器件技术展望。

Development and Application of MEMS Deformable Mirror

Deformable mirror (DM) is a very important element in adaptive optical system, and it can perform dynamic phase modulation and endow optical system the ability to decrease the influence of dynamic wavefront errors. Deformable mirror of conventional adaptive optics can not satisfy the need of miniaturization and integration, but the deformable micro-mirror based on microelectro-mechanical systems (MEMS) can solve these problems. The theory and development of MEMS-DM and its application in adaptive optics are...