| 硅片表面球形粒子散射及微分散射截面的研究 |
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| 引用本文： | 崔品静,程兆谷.硅片表面球形粒子散射及微分散射截面的研究[J].激光技术,2006,30(6):561-563,580. |
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| 作者姓名： | 崔品静 程兆谷 |
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| 作者单位： | 中国科学院,上海光学精密机械研究所,上海,201800;中国科学院,研究生院,北京,100039;中国科学院,上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 为了研究硅片表面球形粒子的光散射情况,根据Mie氏理论,采用相差模型,得到了球形粒子在任意线偏振光照射下的散射光光强空间分布的计算方法,给出了球形粒子在s偏振和p偏振光分别以0°和70°角照射下散射光微分散射截面的模拟计算结果,并与相关的实验结果进行了比较,对硅片缺陷自动检测仪的研制具有指导意义。
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| 关 键 词： | 散射 光强空间分布 米氏理论 相差模型 微分散射截面 |
| 文章编号： | 1001-3806（2006）06-0561-03 |
| 收稿时间： | 2005-10-12 |
| 修稿时间： | 2005-10-122005-12-12 |
Calculation and analysis of light scattering and differential scattering cross section from a spherical particle on silicon wafer |
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| CUI Pin-jing,CHENG Zhao-gu.Calculation and analysis of light scattering and differential scattering cross section from a spherical particle on silicon wafer[J].Laser Technology,2006,30(6):561-563,580. |
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| Authors: | CUI Pin-jing CHENG Zhao-gu |
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| Abstract: | Based on Mie theory,the phase difference model for calculating and analyzing the spatial distribution of scattering intensity from a spherical particle on a smooth surface radiated by a linearly polarized light beam is obtained. The differential scattering cross section is calculated when the s and p polarized light irritates the particles at 0°and 70°respectively. The calculation results are compared with experimental results. |
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| Keywords: | scattering spatial distributing of intensity Mie theory phase difference model differential scattering cross section |
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