| 离子束增强沉积薄膜合成及其在材料表面优化中的应用 |
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| 引用本文： | 柳襄怀.离子束增强沉积薄膜合成及其在材料表面优化中的应用[J].上海有色金属,1994,15(2):65-72. |
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| 作者姓名： | 柳襄怀 |
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| 作者单位： | 中国科学院上海冶金研究所离子束开放研究实验室 |
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| 摘 要： | 作者在多年实验工作的基础上，论述了离子束增强沉积薄膜合成及其在材料表面优化中的应用、所用设备、膜的合成、表面优化技术与机理，并展望了前景。
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| 关 键 词： | 离子束沉积 薄膜合成 表面优化 |
Synthesis of Reinforced Ionic Beam Deposited Films and Their Application in the Surface Optimization of Materials |
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| Liu Xianghuai.Synthesis of Reinforced Ionic Beam Deposited Films and Their Application in the Surface Optimization of Materials[J].Shanghai Nonferrous Metals,1994,15(2):65-72. |
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| Authors: | Liu Xianghuai |
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| Abstract: | On the ground of many years'laboratory work of the author,the synthesis of reinforced ionic beam deposited films,their application in the surface optimization of materials,the equipments used, the techniques and mechanism of film synthesis and surface optimization are related.The prospects are also looked forward. |
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| Keywords: | Ionic beam deposition Film synthesis Material reinforcement Surface optimization |
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