| 微系统技术中的LIGA工艺 |
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| 引用本文： | 段铁群,王香文. 微系统技术中的LIGA工艺[J]. 电机与控制学报, 1996, 0(1) |
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| 作者姓名： | 段铁群 王香文 |
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| 作者单位： | 哈尔滨电工学院，东北传感技术研究所 |
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| 摘 要： | 简单介绍微系统技术中ＬＩＧＡ工艺的发展，基本工艺步骤、特点和应用情况．
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| 关 键 词： | LIGA工艺，电镀，注塑成型，X射线印刷技术，微结构 |
The LIGA Technique in Microsystem Technology |
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| Duan Tiequn. The LIGA Technique in Microsystem Technology[J]. Electric Machines and Control, 1996, 0(1) |
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| Authors: | Duan Tiequn |
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| Affiliation: | Duan Tiequn(Harbin Institute of Electrical Technolgy)Wang Xingwen(the 49th Research Institute of the Ministry of Electronics Industries) |
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| Abstract: | In the papen the development of the LIGA technique in microsysten, the basic technolgical steps, the charcteristics and lie application are brifly presented. |
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| Keywords: | LIGA techpoqge electroplating injection molding deep-etch x-raylithography microstructures. |
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