大行程精密定位超磁致伸缩驱动器的设计与控制

实现一种新型的固态智能材料驱动大行程精密驱动器的设计和控制。基于超磁致伸缩驱动原理和柔性铰链放大机构,采用非永磁和永磁偏置驱动器粗—精驱动组合设计,研制大行程精密超磁致伸缩组合驱动器。建立永磁偏置下的电磁、永磁复合磁场激励的驱动器位移控制系统传递函数模型,实现了粗、精分级精密定位控制方法。实现一套超磁致伸缩组合驱动器原型样机,并进行了精密定位驱动试验验证测试。试验结果证明系统模型的准确性和控制方法的有效性,样机驱动行程可达0.71 mm。并测得在温升负效应情况下,控制行程在0.6 mm范围内,所设计超磁致伸缩组合驱动器位移分辨率为±30 nm,驱动位移精度达±90 nm。研究成果可广泛用于基于固态智能材料驱动的大行程精密驱动装置的设计和实现。

Design and Control of Giant Magnetostrictive Actuator for Long-stroke Precision Positioning

Design and control method to a novel precision and large stroke actuator driven by solid-state smart material are realized.With the combination of coarse and fine drive mechanism,a combined large stroke giant magnetostrictive actuator is constructed.Main researches concerning the design of the novel actuator,the control system and experimental method based upon the actuator prototype are introduced.Control and transfer-function model by taking consideration of the combined excitation of electromagnetic field and permanent-magnet biased field is established;meanwhile,a coarse-fine precision control scheme is implemented.The experimental results prove both the capacity of long stroke and positioning accuracy of the actuator and the effectiveness of the control system with the control method.The output stroke may reach up to 0.71 mm.To limit the heat expansion effect,the running stroke is set up to 0.6 mm.The precision of each using giant magnetostrictive actuator may reach ±30 nm,and the precision of the combined giant magnetostrictive actuator may reach up to ±90 nm.The mechanism and control method in current work may be generally used in solid-state smart-material drive actuator for realizing large-stroke and high precision positioning.