|
|||||
|
|
| 用于微观几何形状测量的扫描探针显微技术 | |
| 引用本文： | 王晓东,常城,宋洪侠. 用于微观几何形状测量的扫描探针显微技术[J]. 传感器与微系统, 2003, 22(9): 8-11,15 |
| 作者姓名： | 王晓东 常城 宋洪侠 |
| 作者单位： | 1. 大连理工大学,微系统研究中心,辽宁,大连,116024 2. 哈尔滨工程大学,自动化学院,黑龙江,哈尔滨,150001 3. 大连理工大学,机械工程学院,辽宁,大连,116024 |
| 摘 要： | 随着微技术的发展,对微观结构的精确测量变得越来越重要。对能够用于微观几何形状测量的扫描探针显微技术———扫描隧道显微术(STM)、扫描光学近场显微术(SNOM)和原子力显微术(AFM)进行了比较详细的分析和介绍。 |
| 关 键 词： | 扫描探针显微术 微观几何形状 传感器 |
| 文章编号： | 1000-9787(2003)09-0008-04 |
Scanning probe microscopy for micro-geometry measurement |
|
| WANG Xiao-dong,CHANG Cheng,SONG Hong-xia. Scanning probe microscopy for micro-geometry measurement[J]. Transducer and Microsystem Technology, 2003, 22(9): 8-11,15 | |
| Authors: | WANG Xiao-dong CHANG Cheng SONG Hong-xia |
| Affiliation: | WANG Xiao-dong~1,CHANG Cheng~2,SONG Hong-xia~3 |
| Abstract: | With the development of microtechnology, the measurement of the geometry of microstructures with high accuracy becomes more and more important. Some of the techniques of scanning probe microscopy which are used for micro-geometry measurement are summarized and analyzed, including scanning tunneling microscopy,scanning near-field optical microscopy and atomic force microscopy. |
| Keywords: | scanning probe microscopy (SPM) micro-geometry sensors |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |