用振动器检定圆度仪测量系统的滤波特性

目前,国内还没有有效的检定方法和工具定量地检定国内生产或国外进口的圆度仪测量系统的滤波特性。为此,我们提出了一种新的检定传感器旋转式(检定时不用从圆度仪上拆下传感器)和工作台旋转式圆度仪滤波特性的差动式超低频(低频可至0.042Hz)微振动器(振幅不大于10μm)用于检定国内外生产的圆度仪各滤波档的滤波特性。

The Verification of the Filtering Characteristic for the Measuring System of a Roundness Measuring Instrument Using the Differential Ultralow Frequency Micro-Vibrator

A roundness measuring instrument is a kind of high-precision measuring instrument. If error separation techniques are used, the measuring accuracy will be within nanometers.However, the filtering characteristic (the profiles and dimensions of the cutoff terminals for the lower and upper frequencies) of the measuring system(pickup-amplifier-filter-recorder) for a roundness measuring instrument will directly influence the measuring accuracy. Therefore, the filtering characteristic must be verified. At present no instrument is available for verifying the filtering characteristic of such a measuring system when the frequency is near 0.042Hz. But in actual practice, low frequencies near 0.042Hz are encountered. In order to solve the above-mentioned problem we have done much analysis,made calculations, and done much experimental research. We have developed a high-precision differential ultralow frequency micro-vibrator, which can verify filtering characteristic of such a measuring system in the frequency range of 0.042-50Hz. The vibrator developed has been proved successful experimentally. The details of the development of our instrument are given in the paper.