Preparationin situ and properties of thin films HTSC YBa2Cu3O x |
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| Authors: | M I Faley M E Gershenson |
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| Affiliation: | (1) Institute of Radio Engineering and Electronics of the Academy of Sciences of the USSR, Marx av. 18, GSP-3, 103907 Moscow, USSR |
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| Abstract: | We describe the technique ofin situ preparation of thin (d=0, 1-1μm) YBCO films by the RF magnetron sputtering of the ceramic target in the argon-oxygen atmosphere on the heated substrates, and report the preliminary results of investigation of the multilayer structure based on such films. |
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| Keywords: | High temperature superconductivity films RF sputtering |
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