基于FPGA的硅谐振压力微传感器数字闭环系统设计

在微小型特别是硅谐振微传感器中,低信噪比的微弱信号检测,电路的小型化和抗干扰等问题十分突出。介绍了硅谐振压力微传感器闭环系统的基本工作原理,在成功研制出模拟闭环系统的基础上,为了克服模拟系统的不足,依据相关检测原理和频率扫描技术提出了基于FPGA的闭环系统设计框架,详细分析了该系统中的微弱信号检测技术和数字电路部分数字信号处理及接口技术,最后结合实际数据和开环测试曲线,指出可用的扫频方法。

Design and Implement of Digital Closed-loop System on Silicon Resonant Micro-sensor Based on FPGA

In the application of small sensor and micro-sensor,especially the silicon resonant micro-sensor,the weak signal detection with low Signal Noise Ratio(SNR),the miniaturization and the anti-jamming problems of the closed loop system are quite outstanding.This paper simply introduces the basic working principle of this system.The closed loop system design frame based on FPGA is also proposed.Digital signal processing and interface circuit in digital circuitry part are analyzed in detail as well as weak signal detection in analogy circuitry part.At last,different frequency searching methods in air or vacuum are presented according to the experiment data and open loop curves.