Modeling and optimal design of multilayer thermal cantilever microactuators |
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| Authors: | JianYu Fu DaPeng Chen TianChun Ye BinBin Jiao Yi Ou |
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| Affiliation: | (1) Silicon Device and Integration Technology Department, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China |
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| Abstract: | A model of curvature and tip deflection of multilayer thermal cantilever actuators is derived. The simplified expression received
from the model avoids inverting complex matrices enhances understanding and makes it easier to optimize the structure parameters.
Experiment is performed, the modeled and experimental results demonstrate the validity of the model, and it also indicates
that Young’s module makes great contribution to the deflection; therefore, thin layers cannot be ignored arbitrarily.
Supported by the National Natural Science Foundation of China (Grant No. 60576053) and Hi-Tech Research and Development Program
of China (Grant No. 2007AA03Z333) |
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| Keywords: | thermal microactuator tip deflection multilayer model optimization |
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