High performance flat miniature heat pipes fabricated by UD-LIGA process

 The objective of this work is to process a high performance flat miniature heat pipes (FMHP). The FMHP is fabricated by ultra-deep LIGA (UD-LIGA) process developed by SRRC. Moreover, the performance of the FMHP is theoretically estimated. The dimensions of microgrooves on the FMHP are 1 mm in depth, 100 μm in width, and 60 mm in length. The theoretically predicted results show that the dissipated heat flux can reach to 391 W at a working temperature of 100 °C. Received: 10 August 2001/Accepted: 24 September 2001 This paper was presented at the Fourth International Workshop on High Aspect Ratio Microstructure Technology HARMST 2001 in June 2001.