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基于锁相循环投影的三维曲面光学检测
引用本文:高建华,周灿林.基于锁相循环投影的三维曲面光学检测[J].半导体光电,2000,21(4):272-275.
作者姓名:高建华  周灿林
作者单位:山东工业大学数理系!山东济南250061
摘    要:由一组规则栅线投影到物体表面的变化光栅,采用锁相循环解调算法解调出含有物体表面高度信息的相位。该技术的最大优势是不需传统的相位去包裹,利用该算法对二维栅线图扫描确定相位,给出了一个典型试件的实验结果和分析。

关 键 词:三维形貌检测  锁相循环投影  光学检测
文章编号:1001-5868(2000)04-0272-04
修稿时间:1999年10月20日

3-D Surface Optical Measurement Based on Phase- locked Loop Profilometry with Grating Projection
GAO Jian hua,ZHOU Can lin.3-D Surface Optical Measurement Based on Phase- locked Loop Profilometry with Grating Projection[J].Semiconductor Optoelectronics,2000,21(4):272-275.
Authors:GAO Jian hua  ZHOU Can lin
Abstract:An innovate technique for obtaining automatic three-dimensional shape information of a diffuse surface is presented.The technique is based on a new approach of phase measurement from a deformed projection grating which carries 3-D information of the object.Demodulation is carried out by determining the phase of these deformed projected grating using a novel digital phase locked loop demodulation algorithm.The technique has the main advantage that the traditional phase unwrapping process is not required.The phase is determined continuousely as the algorithm scans the two-dimensional fringe pattern.Theoretical analysis and experimental result of a typical object are presented.
Keywords:D surface contouring  phase measurement  profilometry of projected grating
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