高灵敏加速度计微弱信号提取电路设计与测试

介绍了一种压阻式高灵敏加速度传感器微弱信号提取电路。该信号提取电路采用两级信号放大设计,两级之间设计有二阶巴特沃兹低通滤波器。本设计电路通过电路仿真软件进行仿真和外接加速度计测试。测试结果表明,该微弱信号检测提取电路可以很好地对高灵敏MEMS加速度计输出的信号进行放大,具体表现为可将传感器输出信号从毫伏级放大到伏级。采用这种电路设计的MEMS高灵敏加速度计输出信号具有良好的低频特性,可以满足高灵敏传感器宽频带测试的需要。

Circuit design and testing based on the weak signal of MEMS high-sensitivity accelerometers

This paper describes an extraction circuit based on the weak signal of high-sensitivity piezoresistive acceleration sensor.The signal extraction circuit uses two signal amplification design,between the two second-order were designed Butterworth low-pass filter.The design of the circuit by circuit simulation software for simulation and external accelerometer testing.The testing results show that the extraction of weak signal detection circuit can be good for high-sensitivity MEMS accelerometer output signal amplification,the specific performance of the sensor output signal can be amplified from millivolts to volts level.The output signal of MEMS high-sensitivity accelerometers which adopt this circuit design has a good low-frequency characteristics.