Counter-doped MOSFETs of 4H-SiC |
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Authors: | Ueno K Oikawa T |
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Affiliation: | Fuji Electr. Corp. Res. & Dev. Ltd., Matsumoto ; |
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Abstract: | In this paper, we investigate the effect of counter-doping of nitrogen at the channel region of epitaxial n-channel 4H-SiC MOSFETs on the channel mobility and the threshold voltage. From this study, we have found that the channel mobility steeply improves as the nitrogen dose increases. At a dose of 2× or 2.5×1012 cm-2 the enhancement MOSFET has achieved an effective channel mobility of 20 cm2/Vs or a field effect mobility of 38 cm2/Vs at a peak |
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