| Al2O3陶瓷上沉积金刚石薄膜的研究 |
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| 引用本文： | 黄晓琴 夏义本. Al2O3陶瓷上沉积金刚石薄膜的研究[J]. 功能材料与器件学报, 1995, 1(2): 119-122 |
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| 作者姓名： | 黄晓琴 夏义本 |
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| 作者单位： | 上海大学材料科学与工程学院 |
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| 摘 要： | 以酒精为碳源，用热丝ＣＶＤ法对不同表面状态的Ａｌ２Ｏ３衬底进行了金刚石薄膜沉积的比较，用扫描电镜，喇曼光谱和Ｘ射线衍射等方法检测了沉积出的金刚石膜的质量，并讨论了它们对成核和生长的影响。
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| 关 键 词： | 金刚石薄膜 热丝CVD法 成核 氯化铝陶瓷 沉积 |
INVESTIGATION OF DIAMOND FILMS DEPOSITED ON Al_2O_3 CERAMIC MATERIALS USING HOT-FILAMENT CVD |
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| HUANG Xiaoqin,XIA Yiben,MO Yaowu and WANG Hong. INVESTIGATION OF DIAMOND FILMS DEPOSITED ON Al_2O_3 CERAMIC MATERIALS USING HOT-FILAMENT CVD[J]. Journal of Functional Materials and Devices, 1995, 1(2): 119-122 |
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| Authors: | HUANG Xiaoqin XIA Yiben MO Yaowu WANG Hong |
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| Abstract: | Three groups of Al_2O_3 ceramic material with different surface morphology have been tested forthe deposition of diamond film by using tungsten-filament chemical vapor deposition method from agas mixture of C_2H_5OH and hydrogen. Their influence on nucleation and growth of diamond crystalon Al_2O_3 has been discussed.X-ray diffraction analysis, Raman spectrum and SEM show that highquality of polycrystalline diamond film has been obtained on Al_2O_3 ceramic material by HFCVD. |
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| Keywords: | diamond films hot-filament CVD nucleation |
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