| 软X射线激光多层膜均匀性控制技术 |
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| 引用本文： | 林炳,金春水,马月英,裴舒,曹健林.软X射线激光多层膜均匀性控制技术[J].光学仪器,2001(Z1). |
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| 作者姓名： | 林炳 金春水 马月英 裴舒 曹健林 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室(林炳，金春水，马月英，裴舒)，中国科学院 (曹健林) |
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| 摘 要： | 软 X射线激光技术在近年来得以较快的发展 ,而多层膜是其不可缺少的一项基础技术 ,软 X射线激光多层膜本身的要求使得多层膜的结构性需达到很高的水平。现就软X射线激光多层膜的均匀性控制技术进行研究 ,以期得到更加精确的膜层结构。
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| 关 键 词： | 软X射线激光 多层膜 均匀性控制 |
Uniformity control research of soft x-ray laser multilayers |
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| LIN Bing,JIN Chung shui,MA Yue ying,PEI Shu,CAO Jina lin.Uniformity control research of soft x-ray laser multilayers[J].Optical Instruments,2001(Z1). |
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| Authors: | LIN Bing JIN Chung shui MA Yue ying PEI Shu CAO Jina lin |
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| Abstract: | Soft X ray laser had been got a rapid progress in recent years,and the multiplayer mirrors for it are essential factor on processing laser study.But the critical requirement of soft X ray laser multiplayer construction makes the much difficulty in fabricating high uniformity coatings.In this passage,we mainly perform the most important technology of uniformity control in large field substrate,so as to get further progress in multiplayer construction. |
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| Keywords: | soft X ray laser multilayer film uniformity control |
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