负压式气浮平台供气压力的研究

液晶平板在线检测过程中,使用负压式气浮系统的稳定性更高,为了比较负压的大小对气膜稳定性、供气参数、质量流量的影响,运用气体润滑理论,对气浮平台的单个节流孔进行理论分析,得到气膜平面的压力分布规律。建立正负压节流孔间隔排布的通孔阵列模型,通过Gambit建立模型并划分网格,对模型提供不同的负压,导入Fluent进行数值计算,得到各种情况下通孔阵列和阵列中心的压力、速度分布曲线。比较得到负压为-2 k Pa时,气膜稳定性更好。分析不同负压所需与之匹配的正压,得到对同一支承物,气膜厚度不变的情况下,正压随负压的变化规律。最后从稳定性和经济性因素出发,得到玻璃光学检测仪器的气浮支承平台的供气参数。

Study on Supply Pressure of Negative Pressure Air Floating Platform

It is higher stability to use negative pressure air float system in liquid crystal diode (LCD) glass plate on line testing process, in order to compare the influence on the gas film pressure , gas parameters and the impact of mass flow that caused by the size of negative pressure, using the gas lubrication theory, theoretical analysis of the single orifice of the flotation platform is carried out. The pressure distribution law of the film plane was obtained. A through hole array model was established to arrange the interval between the positive and negative pressure orifice, using Gambit to establish the model and division of grid, the model was given a different negative pressure into the Fluent for numerical calculation, the pressure and velocity distribution profiles of the through hole array and the center of the array were obtained in all cases. When the negative pressure was -2 kPa, the film stability was better by comparion. Analysis of different negative pressure required to match the positive pressure, to the same bearing, the film thickness of the case of constant, the law of positive pressure changed with the negative pressure was gotten. Finally, from the stability and economic factors, the air supply parameters of the airfoil support platform of the glass optical inspection instrument are obtained.