| 基于系统模型的快速退火炉温度控制器设计 |
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| 引用本文： | 龙长林,钟新华.基于系统模型的快速退火炉温度控制器设计[J].激光与红外,2009,39(2):197-200. |
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| 作者姓名： | 龙长林 钟新华 |
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| 作者单位： | 1. 国防科学技术大学机电工程与自动化学院,湖南,长沙,410111
2. 中国电子科技集团公司第四十八研究所,湖南,长沙,410111 |
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| 摘 要： | 提出了一种基于系统模型的快速退火炉温度控制方法。首先采用分段线性化方法和系统辨识方法获得精确的快速退火炉系统模型；然后将该系统模型作为温度控制器的前馈控制，用来提前预测控制输出，提高系统的响应速度，并在此基础上增加反馈控制通道，用来修正模型误差和外界干扰。最后，将此温度控制器应用在我们自主研发的快速退火炉系统上，实验验证了此温度控制器的有效性。
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| 关 键 词： | 系统模型 系统辨识 温度控制器 前馈控制 反馈控制 |
Design of a Model-based Temperature Controller for Rapid Thermal Processor |
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| LONG Chang-lin,ZHONG Xin-hua.Design of a Model-based Temperature Controller for Rapid Thermal Processor[J].Laser & Infrared,2009,39(2):197-200. |
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| Authors: | LONG Chang-lin ZHONG Xin-hua |
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| Affiliation: | School of Mechatronics and Automation, National University of Defense Technology, Changsha 410111,China; 48th Research Institute of China Electronics Technology Group Corporation,Changsha 410111,China |
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| Abstract: | A model-based temperature control method for rapid thermal processor system is presented in this paper.In order to simplify the nonlinear system model,the method of subsection linearization for system modeling was applied.The parameters of the model were got by a method of system identification.The controller is combined feed forward and feedback mechanisms.The feed forward mechanism is used to calculate a prediction of output of the system,so it can improve responding rapidity of control system.The feedback mechanism is used to compensate for modeling errors and disturbance.The controller has been implemented and evaluated by simulation as well as experimental equipment. |
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| Keywords: | system modal system identification temperature controller feedforward control feedback control |
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