| He~＋离子注入KTiOPO_4晶体波导的制备及其性能研究 |
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| 引用本文： | 卓壮,王克明,时伯荣.He~＋离子注入KTiOPO_4晶体波导的制备及其性能研究[J].中国激光,1996,23(3):287-288. |
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| 作者姓名： | 卓壮 王克明 时伯荣 |
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| 作者单位： | 山东师范大学物理系，山东大学物理系，香港城市大学电子工程系 |
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| 摘 要： | 报道了液氮温度Ｈｅ＋离子不同的注入能量和剂量条件下ＫＴｉＯＰＯ４晶体波导的制备，利用Ｍ线光谱法测量了退火后波导各导模的有效折射率，计算了波导层折射率的分布和晶体中离子的射程分布与损伤分布，二者吻合得较好。
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| 关 键 词： | He~＋注入，KTiOPO_4波导，折射率分布，射程分布 |
| 收稿时间： | 1995/1/16 |
Study on the Property and Formation of a KTiOPO4Crystal Waveguide Implanted with He+Ions |
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| Zhuo Zhuang, Wang Keming, Y. T. Chow, Shi Borong.Study on the Property and Formation of a KTiOPO4Crystal Waveguide Implanted with He+Ions[J].Chinese Journal of Lasers,1996,23(3):287-288. |
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| Authors: | Zhuo Zhuang Wang Keming Y T Chow Shi Borong |
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| Abstract: | A KTiOPO4 crystal waveguide was fabricated under the conditions of different implanted energies of He+ ions and a total dose of 2.5×10 16 ions/cm2 at the temperature of liquid nitrigon. The effective refractive index of the guided modes was measured with M line spectra after the He:KTP was annealed. The refractive index profiles of the He:KTP waveguide were calculated and Proved to be in agreement with the damage profile and the range profile. |
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| Keywords: | He+ implantation KTP waveguides refractive index profiles range profiles |
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