| 双光子三维微细加工技术及实验系统的开发 |
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| 引用本文： | 蒋中伟,袁大军,祝安定,夏安东,黄文浩,褚家如,刘允萍.双光子三维微细加工技术及实验系统的开发[J].光学精密工程,2003,11(3):234-238. |
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| 作者姓名： | 蒋中伟 袁大军 祝安定 夏安东 黄文浩 褚家如 刘允萍 |
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| 作者单位： | 1. 中国科学技术大学,精密机械与精密仪器系,安徽,合肥,230026
2. 中国科学技术大学,精密机械与精密仪器系,安徽,合肥,230026;中国科学院,分子反应动力学国家重点实验室,北京,100080 |
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| 基金项目： | 国家自然科学基金资助项目 (No .5 0 2 75 14 0 ) |
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| 摘 要： | 介绍了一种新型的三维微细加工技术,描述了自行开发的双光子微细加工实验系统.双光子三维微细加工技术利用材料与飞秒激光束在焦点局域发生的双光子激发,通过逐点扫描,实现微器件的三维成型.由于材料发生双光子激发的几率与激发光强的平方成正比,所以具有极高瞬时光强的飞秒激光器和可以对光束进行强聚焦的显微镜装置成为系统的关键部件,对此进行了详细的说明.最后,给出了部分利用上述加工系统所获得的初步实验结果.
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| 关 键 词： | 双光子激发 光聚合 飞秒激光器 三维微器件 |
| 文章编号： | 1004-924X(2003)03-0234-05 |
| 收稿时间： | 2003/1/24 |
| 修稿时间： | 2003年1月24日 |
2-photon 3-D microfabrication technology and its experimental system |
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| JIANG Zhong wei ,YUAN Da jun ,ZHU An ding ,XIA An dong ,HUANG Wen hao ,CHU Jia ru ,LIU Yun ping.2-photon 3-D microfabrication technology and its experimental system[J].Optics and Precision Engineering,2003,11(3):234-238. |
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| Authors: | JIANG Zhong wei YUAN Da jun ZHU An ding XIA An dong HUANG Wen hao CHU Jia ru LIU Yun ping |
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| Affiliation: | JIANG Zhong wei 1,YUAN Da jun 1,ZHU An ding 1,XIA An dong 1,2,HUANG Wen hao 1,CHU Jia ru 1,LIU Yun ping 1 |
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| Abstract: | The 2 photon 3D microfabrication technology employs the 2 photon excitation locally induced between the femtosecond laser and the material to achieve 3D shaping through point to point scan. For the probability of two photon excitation is in direct proportion to the squared intensity of laser, both the femtosecond laser with extremely high pulse intensity and the microscope with high numerical aperture become critical components in the system, and therefore much detail information is provided on this particular aspect. Some preliminary experimental results obtained with the machining system are presented as well. |
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| Keywords: | two photon excitation photoploymerization femtosecond laser three dimensional microdevice |
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