A collimation mirror in polymeric planar waveguide formed by reactive ion etching |
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| Authors: | Jin-Ha Kim R.T. Chen |
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| Affiliation: | Dept. of Electr. & Comput. Eng., Univ. of Texas, Austin, TX, USA; |
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| Abstract: | We fabricated and characterized an integrated optical mirror in a polymeric waveguide. A parabola-shaped cavity is etched in fluorinated polyimide using oxygen reactive ion etching. The vertically etched sidewall of the planar waveguide works as a highly reflecting total-internal-reflection mirror, which collimates a diverging beam from its focus. The estimated mirror insertion loss of the demonstrated device is 2.4 dB or less. |
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