| 真空腔体O形圈密封中燕尾槽使用的研究 |
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| 引用本文： | 朱海科,甘志银,刘宇峰. 真空腔体O形圈密封中燕尾槽使用的研究[J]. 机电工程, 2011, 28(2): 180-183 |
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| 作者姓名： | 朱海科 甘志银 刘宇峰 |
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| 作者单位： | 华中科技大学机械制造及自动化系,湖北,武汉,430074;广东昭信半导体装备制造有限公司,广东,佛山,528251 |
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| 摘 要： | 为解决在真空腔体中如何利用燕尾槽进行O形圈密封的问题,首先介绍了燕尾槽在金属有机物化学气相沉积(MOCVD)设备研制中的应用,接着介绍了O形圈密封失效的准则,然后利用ANSYS商用软件对不同规格的O形圈及相应的燕尾槽建立了模型,并进行了分析和计算,最后得到了具有较高工程指导价值的结论.研究结果表明,在O形圈密封中,当密...
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| 关 键 词： | O形圈密封 燕尾槽 有限元 拉伸率 压缩率 |
Research of dovetail groove's use in O ring sealing of vacuum cavum |
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| ZHU Hai-ke,GAN Zhi-yin,LIU Yu-feng. Research of dovetail groove's use in O ring sealing of vacuum cavum[J]. Mechanical & Electrical Engineering Magazine, 2011, 28(2): 180-183 |
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| Authors: | ZHU Hai-ke GAN Zhi-yin LIU Yu-feng |
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| Affiliation: | ZHU Hai-ke1,2,GAN Zhi-yin1,LIU Yu-feng1,2(1.Department of Mechanical Manufacturing and Automation,Huazhong University of Science and Technology,Wuhan 430074,China,2.Guangdong Realfaith Semiconductor Equipment Co.,Ltd.,Foshan 528251,China) |
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| Abstract: | In order to solve the problem of how to use dovetail groove in O ring sealing in the vacuum cavum,the usage of dovetail groove in manufacture of metal organic chemical vapor deposition(MOCVD) was first introduced.After the rules of O ring sealing's invalidation were given,the models of different O rings and corresponding dovetail grooves were established and analyzed by using ANSYS commercial software.The conclusions were given which will be valuable for engineering application.The research result shows tha... |
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| Keywords: | O ring sealing dovetail groove finite element stretching ratio compressing ratio |
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