| 适宜动态检测的新型谐振式水晶温度传感器 |
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| 引用本文： | 徐军,李欣,林冬辉,陈冬维,林江.适宜动态检测的新型谐振式水晶温度传感器[J].传感器与微系统,2000,19(2):35-37. |
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| 作者姓名： | 徐军 李欣 林冬辉 陈冬维 林江 |
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| 作者单位： | 1. 哈尔滨理工大学,工业技术学院,黑龙江,哈尔滨,150076
2. 哈尔滨龙成新能源高科技开发公司,黑龙江,哈尔滨,150001 |
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| 摘 要： | 成功地研制一种适宜动态温度检测的厚度切变C模工作的压电谐振式水晶温度传感器。它采用NLSC切型 ,变形的平凸结构 ,谐振频率为 19.5MHz。实测表明 ,其Q值为 2 1.3× 10 4 ,电容比为 72 0 ,温度系数为 18.8× 10 -6/℃。响应速度为 2s,经 15 0 0次热冲击试验 ,准确度不变。
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| 关 键 词： | 温度传感器 压电水晶谐振器 动态温度测量 |
New type of piezoresonant quartz temperature sensor for dynamic temperature detection |
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| XU Jun,LI Xin,LIN Dong-hui,CHENG Dong-wei,Lin Jiang.New type of piezoresonant quartz temperature sensor for dynamic temperature detection[J].Transducer and Microsystem Technology,2000,19(2):35-37. |
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| Authors: | XU Jun LI Xin LIN Dong-hui CHENG Dong-wei Lin Jiang |
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| Affiliation: | XU Jun 1,LI Xin 1,LIN Dong-hui 2,CHENG Dong-wei 2,Lin Jiang 2 |
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| Abstract: | A new type of piezoresonance quartz temperature sensors using thickness shear C mode with the modi fied planoconvex crystal plates has been developed .It uses NLSC cut,the resonant frequency is 19.5 MHz. Experimental data show that the Q- value of 21.3×104,the capacity ratio of 720,the temperature coefficient of 18.8×10 -6 /℃, the response time of 2?s,it doesn't change in precision after 1?500 thermal shocks. It is fit for dynamic temperature detecting. |
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| Keywords: | temperature sensor piezoelectric quartz resonator dynamic temperature detection |
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