| MEMS技术在THz无源器件中的应用 |
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| 引用本文： | 赵兴海,鲍景富,杜亦佳,高杨,郑英彬.MEMS技术在THz无源器件中的应用[J].传感器与微系统,2011,30(7):5-9. |
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| 作者姓名： | 赵兴海 鲍景富 杜亦佳 高杨 郑英彬 |
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| 作者单位： | 1. 中国工程物理研究院电子工程研究所,四川绵阳,621900
2. 电子科技大学,四川成都,611731 |
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| 基金项目： | 中国工程物理研究院科学技术发展基金重点资助项目(2008A0403016) |
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| 摘 要： | 太赫兹技术将在未来高精度频谱探测技术、高分辨率成像和高性能通讯等应用前景良好.太赫兹技术处于电子学与光子学领域的交叉领域,太赫兹器件的尺寸在数十微米到毫米量级,传统的机械加工技术很难达到加工精度要求,甚至无法加工.MEMS技术在太赫兹器件的加工方面具有巨大的优势.总结了目前采用DRIE,LIGA等工艺加工太赫兹器件的研...
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| 关 键 词： | 太赫兹器件 微机电系统 LIGA 深反应离子刻蚀 |
Application of MEMS technology in passive THz-devices |
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| ZHAO Xing-hai,BAO Jing-fu,DU Yi-jia,GAO Yang,ZHENG Ying-bin.Application of MEMS technology in passive THz-devices[J].Transducer and Microsystem Technology,2011,30(7):5-9. |
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| Authors: | ZHAO Xing-hai BAO Jing-fu DU Yi-jia GAO Yang ZHENG Ying-bin |
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| Affiliation: | ZHAO Xing-hai1,BAO Jing-fu2,DU Yi-jia2,GAO Yang1,ZHENG Ying-bin1(1.Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang 621900,China,2.University of Electronic Science and Technology of China,Chengdu 611731,China) |
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| Abstract: | The primary applications for terahertz(THz)technology have so far been high precision spectrum detection technology,superresolution imaging,and high performance communication et al.THz region locates on the border between far-IR and submillimeter which is still rather blurry.The dimension of THz devices is from several ten micrometers to several millimeters which are difficult or hard to fabricate by the traditional machining technology.MEMS technology has many advantages to fabricate these devices.An overv... |
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| Keywords: | THz devices MEMS LIGA DRIE |
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