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Transparent conducting films
Authors:T P Sharma  C P Pandey
Affiliation:(1) Department of Physics, Institute of Advanced Studies, Meerut University, 250 005 Meerut, India;(2) Present address: Department of Physics, S.S. College, 242 001 Shahjahanpur, India
Abstract:We present here a new technique, called vapour phase spray pyrolysis, for deposition ofto andito films. Undopedto film showed semiconducting nature, a sheet resistance of 1088 Ω/□, a donor ionization energy level of 40 meV, average visible transmittance of 75·4% andn-type conductivity. The indium doped (ito) film 10 wt % showed metallic nature, a sheet resistance of 15 Ω/□, average visible transmittance of 80·4 % andp-type conductivity. Thus theto andito films showed fairly good electro-optical qualities, comparable to those obtained by sophisticated and costly techniques.
Keywords:Vapour phase spray pyrolysis  sheet resistance  impurity ionization energy  transmittance
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