| 碱土金属掺杂SnO_2薄膜气体传感器 |
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| 引用本文： | 傅敏恭,王晓俊,陈戬,王海源.碱土金属掺杂SnO_2薄膜气体传感器[J].郑州轻工业学院学报(自然科学版),1994(Z1). |
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| 作者姓名： | 傅敏恭 王晓俊 陈戬 王海源 |
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| 作者单位： | 南昌大学化学系 |
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| 摘 要： | 经过真空镀锡膜、氧化和化学浸渍，制作了碱土金属掺杂ＳｎＯ２薄膜气敏元件，并测试了元件的气敏特性．结果表明，元件对乙醇和丙酮气体灵敏度和选择性得到提高、而对苯、丁烷、液化石油气、氨气、氢气和煤气不敏感．
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| 关 键 词： | 碱土金属 氧化锡 薄膜 气体传感器 |
THE ALKALINE EARTH METAL DOPED SnO2 THIN FILM GAS SENSOR |
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| Fu Mingong ,Wang Xiaojun ,Chen Jian, Wang Haiyuan.THE ALKALINE EARTH METAL DOPED SnO2 THIN FILM GAS SENSOR[J].Journal of Zhengzhou Institute of Light Industry(Natural Science),1994(Z1). |
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| Authors: | Fu Mingong Wang Xiaojun Chen Jian Wang Haiyuan |
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| Affiliation: | Chemistry Department of Nanchnag University |
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| Abstract: | The alkaline earth metal doped SnO2 thin film gas sensors was manufactured by e-vaporating Sn in vacuum oxiding SnO2 film and immerging method. The gas sensingproperty of thin film material was studled.The doped gas sensors improve the sensitivi-ty and selectivity to CH3CH2OH,CH3COCH3. |
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| Keywords: | alkaline earth metal tin oxide thin films gas sensors |
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