| 键合方法制备长波长面发射的实验和分析 |
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| 引用本文： | 何国荣,郑婉华,渠红伟,杨国华,王青,吴旭明,曹玉莲,陈良惠.键合方法制备长波长面发射的实验和分析[J].半导体学报,2007,28(3):444-447. |
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| 作者姓名： | 何国荣 郑婉华 渠红伟 杨国华 王青 吴旭明 曹玉莲 陈良惠 |
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| 作者单位： | 中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083;中国科学院半导体研究所,北京,100083 |
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| 基金项目： | 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 通过疏水键合方法实现了InGaAsP/InP有源区与GaAs/AlAs DBR的单面和双面键合,并通过SEM,I-V曲线和反射谱、光致发光谱等手段研究了GaAs/InP键合界面的机械、光学和电学性质,良好的界面性质为使用键合技术制备长波长面发射激光器提供了可能性.
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| 关 键 词： | 键合 面发射激光器 光致发光谱 |
| 文章编号： | 0253-4177(2007)03-0444-04 |
| 收稿时间： | 8/25/2006 2:50:40 PM |
| 修稿时间： | 9/29/2006 9:42:15 AM |
Analysis of the Fabrication of a Surface Emitting Laser by the Bonding Method |
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| He Guorong,Zheng Wanhu,Qu Hongwei,Yang Guohu,Wang Qing,Wu Xuming,Cao Yulian and Chen Lianghui.Analysis of the Fabrication of a Surface Emitting Laser by the Bonding Method[J].Chinese Journal of Semiconductors,2007,28(3):444-447. |
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| Authors: | He Guorong Zheng Wanhu Qu Hongwei Yang Guohu Wang Qing Wu Xuming Cao Yulian and Chen Lianghui |
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| Affiliation: | Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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| Abstract: | InGaAsP/InP active regions were single-fused or double-fused to GaAs/AlAs DBRs by hydrophobic bonding.The mechanical,optical,and electrical characteristics of the bonded interfaces were investigated through SEM,reflection spectrum,PL spectrum,and I-V curves.Good performance indicates an excellent interface.This makes it possible for the fabrication of long-wavelength surface emitting lasers by the bonding technique. |
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| Keywords: | bonding surface emitting laser photoluminescence spectrum |
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