| 全方位离子注入与沉积类金刚石碳膜的结构与性能 |
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| 引用本文： | 刘洪喜,蒋业华,周荣,汤宝寅. 全方位离子注入与沉积类金刚石碳膜的结构与性能[J]. 材料热处理学报, 2010, 31(2): 108-112,118 |
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| 作者姓名： | 刘洪喜 蒋业华 周荣 汤宝寅 |
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| 作者单位： | 昆明理工大学机电工程学院,云南,昆明,650093;哈尔滨工业大学现代焊接生产技术国家重点实验室,黑龙江,哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金项目(50671045);;云南省自然基金项目(2008ZC021M);;昆明理工大学分析测试基金(2009-022) |
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| 摘 要： | 用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。
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| 关 键 词： | 类金刚石碳膜(DLC) 等离子体浸没离子注入与沉积(PIIID) Raman光谱 AISI440C不锈钢 |
Microstructure and properties of DLC film synthesized by plasma immersion ion implantation and deposition technique |
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| LIU Hong-xi,JIANG Ye-hua,ZHOU Rong,TANG Bao-yin. Microstructure and properties of DLC film synthesized by plasma immersion ion implantation and deposition technique[J]. Transactions of Materials and Heat Treatment, 2010, 31(2): 108-112,118 |
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| Authors: | LIU Hong-xi JIANG Ye-hua ZHOU Rong TANG Bao-yin |
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| Affiliation: | 1.Faculty of Mechanical and Electrical Engineering;Kunming University of Science and Technology;Kunming 650093;China;2.State Key Laboratory of Advanced Welding Production Technology;Harbin Institute of Technology;Harbin 150001;China |
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| Abstract: | Microstructure and mechanical properties of diamond-like carbon(DLC) films synthesized by plasma immersion ion implantation and deposition(PIIID) on AISI440C stainless steel substrate were studied.Observation by atomic force microscope(AFM) reveals that the DLC film has extremely smooth surface,high uniformity and efficiency of space filling over large areas.Raman spectroscopy analysis indicates that PIIID diamond-like carbon consists of a mixture of amorphous carbon and crystalline phases, with a variable ... |
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| Keywords: | diamond-like carbon (DLC) film plasma immersion ion implantation and deposition (PIIID) raman spectroscopy analysis AISI440C stainless steel |
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