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Fabrication and use of a nanoscale Hall probe for measurements of the magnetic field induced by MFM tips |
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| Authors: | Matveev Victor N Levashov Vladimir I Volkov Vladimir T Kononenko Oleg V Chernyh Anatoly V Knjazev Maxim A Tulin Vyacheslav A |
| Affiliation: | Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Science, Chernogolovka 142432, Institutskaya Street 6, Moscow Region, Russian Federation. |
| Abstract: | Extraordinary Hall effect probes with 160?nm × 160?nm working area were fabricated using photo-?and electron-beam lithographic procedures with the aim of direct measurements of MFM cantilever tip magnetic properties. The magnetic field sensitivity of the probes was 35?Ω?T(-1). Magnetic induction of the MFM cantilever tips coated by Co and SmCo films was measured with the probes. It was shown that the resolution of the probes was of the order of 10?nm. |
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