| 聚酰亚胺膜分子自组装与激光诱导图形化学镀铜 |
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| 引用本文： | 陈东升,路庆华. 聚酰亚胺膜分子自组装与激光诱导图形化学镀铜[J]. 材料保护, 2009, 42(11) |
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| 作者姓名： | 陈东升 路庆华 |
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| 作者单位： | 南京工业大学环境学院,江苏,南京,210009;上海交通大学化学化工学院,上海,200240 |
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| 摘 要： | 为了摒弃化学镀铜中价格昂贵、环境污染的活化工艺,将分子自组装技术与激光诱导化学镀技术结合,在聚酰亚胺薄膜(PI)上成功实现了图形化微米级金属铜沉积:将PI薄膜通过KOH溶液进行表面水解;经离子交换和高温处理在PI表面束缚纳米银粒子,在PI表面自组装上一层十二硫醇的自组装膜;再用聚焦的激光光刻产生预期的图形,最后实施化学镀后,在PI表面上实现金属铜的图形化沉积.采用XPS,AFM,SEM,ATR-FTIR,半导体特性分析系1统和视频光学接触角测量仪等跟踪表征各过程.结果显示:沉积的铜线宽度为30μm,选择性、导电性良好,本法为化学镀技术提供一种新技术,可用于电子行业.
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| 关 键 词： | 分子自组装 激光诱导 化学镀 聚酰亚胺 表面金属化 |
Molecular Self-Assembly Combined with Electroless Copper Plating of Laser-Induced Patterning on Polyimide Film |
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| CHEN Dong-sheng,LU Qing-hua.. Molecular Self-Assembly Combined with Electroless Copper Plating of Laser-Induced Patterning on Polyimide Film[J]. Journal of Materials Protection, 2009, 42(11) |
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| Authors: | CHEN Dong-sheng LU Qing-hua. |
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| Affiliation: | CHEN Dong-sheng1,LU Qing-hua2( 1. College of Environment,Nanjing University of Technology,Nanjing 210009,China,2.School of Chemistry , Chemical Technology,Shanghai JiaotongUniversity,Shanghai 200240,China). |
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| Abstract: | A new method for molecular self-assemblyand electroless Cu plating of laser-induced patterning on polyim-ide film is reported. Thus the surface of the polyimide film washydrolyzed using aqueous KOH, followed by entrapping of Agnanoparticles via ion-exchange and annealing at elevated temper-ature. Then dodecanethiol monolayer was self-assembled on thepolyimide film doped with Ag nanoparticles. Desired microscalepattern was generated on the self-assembled monolayer by directlaser writing, and copper was then ... |
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| Keywords: | molecular self-assembly laser-induced patterning electroless copper plating polyimide film surface metalation |
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