Study of recrystallization of SiC thin films |
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Authors: | Madan Dubey |
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Affiliation: | Department of Physics, Banaras Hindu University Varanasi-221005, India |
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Abstract: | Thin films of SiC have been prepared by electron beam evaporation using 6H, 15R, 4H and other polytypes as starting materials. After pulse-annealing in electron microscope column, various complex structures of hexagonal and cubic phases are observed. The occurrence of 6H as single phase is rare. |
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