Depth profiles of deuterium in titanium from gas emission during sputtering

A simple technique for the determination of the depth distributions of deuterium and tritium in the near-surface region (0–1 μm) of materials has been demonstrated. In particular, the depth distribution of deuterium in a layered, deuterided titanium film has been determined by monitoring the HD and D₂ gas emissions during sputtering by 2 keV argon ions. For the nonoptimized conditions employed the detection sensitivity was $\text{D/Ti}\text{\$}\text{?}\text{0.02}$ and the fractional depth resolution was ~0.24 (i.e., ~240Å for a 1000Å film). Even for these conditions, this technique has a near-surface depth resolution superior, or equal, to that of other techniques for profiling hydrogen and a more than adequate sensitivity for the detection of deuterium and tritium in CTR-related studies, hydride studies and studies of tritided targets for neutron production.