Equipment for checking dielectric losses in silicon matrices with dielectric insulation

Conclusions The industrial apparatus Omega-2 described above employs an indirect method of measuring the leakage current in the pockets of a silicon matrix with dielectric insulation. The basic error of the apparatus does not exceed 5%.By regulating the voltage applied to the pocket, we would be able to select the structure needed for creating devices with high breakdown voltages and low reverse currents.Translated from Izmeritel'naya Tekhnika, No. 1, pp. 61–62, January, 1979.