| ITO镀膜设备气室门阀阀板的改进设计 |
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| 引用本文： | 刘月豹,汪奇,王成雷,王共志,张红,朱旺根. ITO镀膜设备气室门阀阀板的改进设计[J]. 玻璃, 2012, 39(2): 43-46 |
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| 作者姓名： | 刘月豹 汪奇 王成雷 王共志 张红 朱旺根 |
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| 作者单位： | 安徽方兴科技股份有限公司,蚌埠市,233010;安徽方兴科技股份有限公司,蚌埠市,233010;安徽方兴科技股份有限公司,蚌埠市,233010;安徽方兴科技股份有限公司,蚌埠市,233010;安徽方兴科技股份有限公司,蚌埠市,233010;安徽方兴科技股份有限公司,蚌埠市,233010 |
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| 摘 要： | 通过对ITO镀膜设备气室门阀阀板的结构进行改进,解决了实际生产中真空室密封性能差、阀板使用寿命短、产品质量不稳定等一系列问题。改进要点是在主动、从动阀板上增加设计了冷却水循环水道。
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| 关 键 词： | ITO导电玻璃 真空室 阀板 气密性 |
Improved Design of Valve Plate of Air Chamber in the Ito Coating Equipment |
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| Liu Yuebao,Wang Qi,Wang Chenglei,Wang Gongzhi,Zhang Hong,Zhu Wanggen. Improved Design of Valve Plate of Air Chamber in the Ito Coating Equipment[J]. Class, 2012, 39(2): 43-46 |
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| Authors: | Liu Yuebao Wang Qi Wang Chenglei Wang Gongzhi Zhang Hong Zhu Wanggen |
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| Affiliation: | ( Anhui fangxing technology Co., Ltd., Bengbu , 233010) |
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| Abstract: | A series of problems, such as poor sealing of vacuum chamber, short service life of valve plate, instable quality of coated product, were overcome by improving the structure of valve plate of air-chamber in the ITO coating equipment. The main improvement is the installation of the circulating water pipe on the active valve and driven valve for cooling purpose. |
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| Keywords: | ITO conductive glass vacuum chamber valve plate tighteness |
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