薄膜型金刚石辐射剂量计的光电性能

金刚石具有宽禁带、强抗辐射性、与人体软组织接近的原子序数等一系列高质量辐射剂量计所需的性质，正日益受到关注。采用微波等离子体在不同条件和不同制备方法下合成金刚石薄膜，并制作出三明治结构的辐射剂量计。研究金刚石薄膜辐射剂量计的暗电流-电压特性，X光电响应特性及响应动力学。暗电流I-V特性测试结果表明，此剂量计具有欧姆特性。X光电响应测试结果表明，膜的取向和纯度是影响辐射剂量计X光响应灵敏度的主要因素。在纯度相近的情况下，100]取向膜做成的器件X光响应灵敏度高于111]取向膜；在同一取向下，纯度越高，灵敏度越高，“Priming”效应越弱。剂量计响应电流与辐射剂量间有较好的线性关系。通过标校后此金刚石薄膜剂量计能用于辐射剂量的定量检测。

Studies on the Performance of Radiation Dosimeters Based on Diamond Thin Films

A radiation dosimeter was made from diamond films by Microwave Plasma Chemical Vapor Deposition(MWPCVD) in a sandwich configuration. Dark current-voltage(I-V) characteristics, response to X-ray, and priming effect were investigated. Influence of the purity and orientation of diamond films on the sensitivity of the dosimeters was also studied. The linear dark current-voltage characteristics for the devices indicated ohmic behavior. The photoelectric response results showed that the dosimeter based on high purity and high oriented diamond films has high sensitivity. The dosimeter with high purity films has low priming effect. In addition, the response of the devices is linear with the X-ray flux. The results also suggested that through correction the dosimeter can be used in radiation dosimetry.