TiOx薄膜电阻稳定性及氧敏特性的研究

分别采用无机盐的水解－沉淀法和醇盐的溶胶－凝胶法两种工艺在Ａｌ２Ｏ３基片上制备ＴｉＯｘ（ｘ＝１－２．０）薄膜，研究了薄膜结构及氧敏特性。结果表明：水解－沉淀法的膜层粒子分布均匀，工艺易控制；溶胶－－凝胶法的膜层粒子更细微，相变温度较低，两种工艺制得的超微粒薄膜都具有很好的电阻－温度稳定性。膜层粒子愈起细化，分布愈均匀，氧敏特性愈高；薄膜厚度与气体检测灵敏度有密切关系，具有最佳膜层厚度值，两种工艺获

STUDY ON RESISTANCE STABILITY AND OXYGEN SENSITIVITY OF TiOx THIN FILMS

TiO x thin films on the substrate were prepared by hydrolysis-deposition and sol-gel methods, in which titanyl sulfate (TiOSO 4) and titanium alkoxide Ti(OC 4H 9) 4] were used as raw materials respectively. Structure and oxygen sensitivity of the film were discussed mainly. The experimental results show that the particle distribution of the film by hydrolysis-deposition is uniform and the film by sol-gel method has superfine particles of tens of nanometer in diameter. Both of the films have good resistance stability which changes a little with the temperature. The finer and uniformer the particle of the film, the higher is the film ,