Thermal response of AlN and CNx films as coatings of thin film anemometers |
| |
| Authors: | J. Arroyo,S. SilvestreA. Coll,L. Castañ er |
| |
| Affiliation: | Micro & Nano Tech. Group, Electronic Engineering Department, Universitat Politècnica de Catalunya, Campus Nord UPC, C/Jordi Girona 1-3, 08034 Barcelona, Spain |
| |
| Abstract: | Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent models are proposed in this work. AlN performed better in the experiments. |
| |
| Keywords: | Thin film anemometers AlN CNx |
| 本文献已被 ScienceDirect 等数据库收录！ |
