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无驱动微机械陀螺信号处理电路工作带宽扩展
引用本文:刘晓敏,张福学,张增平,张伟.无驱动微机械陀螺信号处理电路工作带宽扩展[J].北京机械工业学院学报,2014(4):46-50.
作者姓名:刘晓敏  张福学  张增平  张伟
作者单位:北京信息科技大学传感技术研究中心,北京100101
基金项目:国家自然科学荩余资助项目(61372016);北京市教育委员会科技计划资助(KM201411232021);北京传感器重点实验室开放课题(5026035205);现代测控技术教育部蕈点实验室开放课题资助项目;电子薄膜与集成器件国家重点实验室(电子科技大学)开放课题(KFJJ201210)
摘    要:针对无驱动结构微机械陀螺的工作带宽进行理论分析,提出一种调整频带宽度的方案。然后利用MATLAB和PSpice软件进行仿真验证,最后利用安捷伦信号发生器81150A对调整前后的电路部分进行实验验证。实验结果表明,通过调整后整个信号处理电路的带宽得到了扩展,使得陀螺在工作频率范围内的信号可以无衰减地通过。这里采用的实验方法是信号发生器的静电驱动动态扫频测试。这种方法与传统采用MEMS三轴转台测试方法相比,更加简便,准确。

关 键 词:微机械陀螺  带宽  静电驱动  扫频

Work bandwidth extension of signal processing circuit of non-driven micro-machined gyroscope
LU Xiao-min,ZHANG Fu-xue,ZHANG Zeng-ping,ZHANG Wei.Work bandwidth extension of signal processing circuit of non-driven micro-machined gyroscope[J].Journal of Beijing Institute of Machinery,2014(4):46-50.
Authors:L[U Xiao-min  ZHANG Fu-xue  ZHANG Zeng-ping  ZHANG Wei
Affiliation:(Center for Sensor Technology Research, Beijing Information Science and Technology University, Beijing 100101 , China)
Abstract:The work bandwidth for non-driven micro-machined gyroscope is analyzed in theory, presenting a scheme to adjust the bandwidth. Using MATLAB and PSpice software simulation to test, the Agilent signal generator 81150 A is applied to experiment to verify the circuit part of non-driven micro- machined gyroscope both before and after adjustment. The experimental results show that the work bandwidth of the signal processing circuit has extended after adjustment, and the signal of the gyro has no attenuation within the scope of the work frequency. Signal generator electrostatic drive frequency sweeping method is adopted in the experiment. Compared with the traditional method of using MEMS three-axis turntable, this method is more convenient and accurate.
Keywords:micro-machined gyroscope  bandwidth  electrostatic drive  frequency sweep
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