The effects of annealing on the structure and composition of electron-beam-evaporated tin oxide films |
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| Authors: | N.S. Choudhury R.P. Goehner N. Lewis R.W. Green |
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| Affiliation: | General Electric Corporate Research and Development, P.O. Box 8, Schenectady, NY 12301 U.S.A. |
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| Abstract: | Electron-beam-evaporated films of tin oxide are amorphous with compositions between SnO and SnO2. Devitrification of the film in an isochronal anneal (24h) begins to occur at about 350°C with the formation of crystalline SnO. At a higher annealing temperature (about 600°C) the amorphous film transforms to SnO2 and metallic tin. |
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