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ZnO layers grown by Atomic Layer Deposition: A new material for transparent conductive oxide |
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| Authors: | M Godlewski E Guziewicz T Krajewski ? Wachnicki A Wachnicka K Kopalko B Dalati |
| Affiliation: | a Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, Warsaw, Poland b Department of Mathematics and Natural Sciences, College of Science, Cardinal Stefan Wyszyński University, Warsaw, Poland c Department of Physics, Faculty of Science, Tishreen University, Latakia, Syria |
| Abstract: | We demonstrate possibility of a control (by selection of zinc precursors and variation of a growth temperature) of electrical properties of ZnO films grown by Atomic Layer Deposition (ALD). ZnO films grown by ALD are used in test photovoltaic devices (solar cells) as transparent conductive oxides for upper, transparent layer in inorganic and organic solar cells, and as n-type partners of p-type CdTe. |
| Keywords: | Atomic Layer Deposition Photovoltaics ZnO Transparent conductive oxides CdTe Organic materials |
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