| 掺杂钼对TiO2-x薄膜氧敏性能的影响 |
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| 引用本文： | 郑嘹赢,徐明霞,刘丽月,徐廷献,董向红. 掺杂钼对TiO2-x薄膜氧敏性能的影响[J]. 材料研究学报, 2000, 14(Z1): 189-193 |
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| 作者姓名： | 郑嘹赢 徐明霞 刘丽月 徐廷献 董向红 |
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| 作者单位： | 天津大学 |
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| 基金项目： | 国家高技术研究发展计划(863计划);; |
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| 摘 要： | 以钛酸丁酯为原料,无水乙醇为溶剂,添加适量稳定剂制成稳定溶胶,用浸涂法在Al2O3基片上制备TiO2薄膜,经1000℃H2下还原制得TiO2-x薄膜,在钼酸铵溶胶中浸泡一定时间得到掺钼薄膜.实验结果表明掺钼薄膜元件在800℃下的氧敏感性和重复性比未掺杂时提高,TiO2-x薄膜的电阻的温度稳定性好.通过对薄膜的XPS分析探讨了钼在薄膜中的作用机理.
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| 关 键 词： | 掺钼 TiO2-x 薄膜 氧敏元件 |
| 文章编号： | 1005-3093(2000)S0-0189-05 |
| 修稿时间： | 1999-06-03 |
THE EFFECT OF Mo-DOPING ON OXYGEN SENSITIVITY OF TiO2-x FILM ELEMENT |
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| ZHENG Liaoying,XU Mingxia,LIU Liyue,XU Tingxian,DONG Xianghong. THE EFFECT OF Mo-DOPING ON OXYGEN SENSITIVITY OF TiO2-x FILM ELEMENT[J]. Chinese Journal of Materials Research, 2000, 14(Z1): 189-193 |
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| Authors: | ZHENG Liaoying XU Mingxia LIU Liyue XU Tingxian DONG Xianghong |
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| Abstract: | The TiO2 films on A12O3 substrates have been prepared by dip-coating method. The tetrabutyl titanate and absolute ethanol were used as raw material and solvent respectively. Some stabilizing agents were added in the solution to obtain stable sols. The TiO2-x. films were gained by reducing TIO2-x films in H2 atmosphere at 1000 . The Mo-doped TiO2-x. films were made of immersing the TiO2-. films in ammonlum molybdate sol for some hours. The experiment results showed that Mo-doped TiO2-x films had better oxygen sensitivity and reproducibility of oxidizingreducing atmosphere than pure TiO2-. films at 800 , and they had excelfent resistance-temperature stability in N2 atmosphere. The roles of Mo in the film were also investigated by using XPS analysis. |
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| Keywords: | Mo-doping TiO2-x. film oxygen sensitive element |
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